On the E - H mode transition in RF inductive discharges

Authors

U Kortshagen
Dan Gibson, Denison UniversityFollow
J E. Lawler

Document Type

Article

Publication Date

1996

Department

Physics & Astronomy

Publisher

IOP Publishing

Recommended Citation

Kortshagen, U. et al. (1996). On the E - H mode transition in RF inductive discharges. Journal of Physics D: Applied Physics, 29(5). http://dx.doi.org/10.1088/0022-3727/29/5/017

ISSN

0022-3727