A radiometric investigation of low-pressure rf sulfur discharges

Authors

Dan Gibson, Denison UniversityFollow
U. Kortshagen
J. E. Lawler

Document Type

Article

Publication Date

1996

Department

Physics & Astronomy

Publisher

AIP Publishing

Recommended Citation

Gibson, N. et al. (1996). A radiometric investigation of low‐pressure rf sulfur discharges. Journal of Applied Physics, 79(10). http://dx.doi.org/10.1063/1.362424

ISSN

0021-8979